TUALATIN, OR--(Marketwired - Nov 1, 2017) - Mega Fluid Systems, Inc., a global supplier of chemical and slurry delivery equipment to the semiconductor, LED, pharmaceutical, specialty chemicals and ...

PHOENIX, AZ--(Marketwired - Mar 17, 2014) - Mega Fluid Systems Inc., a leading supplier of chemical and slurry delivery equipment, and Entrepix Inc., a leading provider of chemical mechanical ...

The semiconductor manufacturing industry continues to progress rapidly, with standards, materials and requirements evolving annually. Industry leaders leverage novel solutions to overcome their ...

A fundamental component of modern electronic goods is the semiconductor. More powerful, faster and smaller processors are in constant demand for many services and goods because of the advent of the ...

Producing high-purity wafers via the CMP process is a critical application and the halting of harmful slurry-DIW ...

Polishing with the help of CMP slurries is an integral part of microcircuit manufacturing. The particle size distribution (PSD) measurement on the CMP slurries is required to ensure their health, ...

CAMPBELL, Calif.--(BUSINESS WIRE)--Vantage Technology today announced it has formally qualified its SlurryScope™ System at major IC production fabs, underscoring its capabilities to continuously ...

SAN JOSE, Calif. — Novellus Systems Inc. moved to lower the cost of chemical mechanical planarization (CMP) Monday (June 21) by rolling out a 300-mm tool that it claimed could be used down to the ...