Electronic Design

Make the Move to Machine Learning, Neural Networks for CMP Modeling

Machine learning (ML), neural networks (NNs), and deep learning have many applications in different areas of modern industry and life. Their ability to “learn” how to analyze and predict imprecise ...
EDN

Blaze DFM’s dummy-fill-synthesis tool has smarts

Blaze DFM is following up its mid-2006 release of its Blaze MO gate-CD biasing/leakage control tool with a dummy fill “synthesis” tool. The tool addresses the problems that IC foundries encounter when ...
EDN

ADE debuts 3D metrology tool for copper CMP

SAN FRANCISCO–ADE Corp. introduced what the company claims is the first non-contact, inline 3-D metrology system for copper CMP processes. NanoXam is said to measure copper dishing of wide lines and ...
AZOM

Using 3D Optical Profiling for Full-Field Hotspot Detection

Chemical mechanical polishing (CMP) – also known as planarization – has long been the most commonly employed technique for smoothing and flattening wafer surfaces during the fabrication of ...
Business Wire

Applied Materials Extends Copper/Low k Leadership with Innovative CMP Technology; Reflexion LK CMP System Planarizes Delicate Low k Interconnects at High Production Speeds

SANTA CLARA, Calif.--(BUSINESS WIRE)--June 25, 2003--Applied Materials, Inc. (Nasdaq:AMAT) announces Reflexion(R) LK, the industry's only low down force, high throughput CMP (chemical mechanical ...